Ultra-high purity and high purity gas control products from AMFLO Fluid Systems & Components Co., Ltd., Shanghai. Covering UHP regulators, valves, back pressure regulators, changeover systems, manifold systems, control panels, accessories, and terminal gas control fittings.
Ultra-high purity regulators for semiconductor gas systems. Series: AU21 (Single-Stage), AU22 (Single-Stage), AU23 (Tied-Diaphragm), AU24 (Integrated Bellows Diaphragm), AU25 (Tied-Diaphragm), AU28/AU29M (Tied-Diaphragm). Materials: SS316L/SS316L VAR; seal materials include Co-Cr-Ni alloy/C-22 options. UHP connections include AFS and other options.
InquireUltra-high purity valves for semiconductor gas distribution. Series: DV13P, DV14P, DV15P, DV26, DV81, DV82. Available in manual and pneumatic configurations. Materials: SS316L/SS316L VAR. Connection options: AFS, AM-LOK, and butt-weld as applicable.
InquireHigh purity regulators for industrial gas systems. Series: R10, R11, R16, RT10W, R43, R45, R51, R61. Features diaphragm/piston/integrated valve-regulator structures. Materials: SS316L or chrome-plated brass. Inlet/outlet pressure ranges and 1/4 NPT or other connection options available.
InquireBack pressure regulators for precise gas pressure control. Series: RT10T, R52, R31, R12, R71, R72, R73. Specifications for pressure, material, and connections per brochure.
InquireHigh purity ball, diaphragm, relief, and needle valves. Ball valves: BV10, BV11A, BV12, BV13, BV21, BV41, BV51, BV100. Diaphragm valves: DV13/DV13P, DV14/DV14P, DV81/DV81P, DV82/DV82P. Relief valves: RV10, RV11, RV12. Needle valve: NV10. Materials: SS316L. Connections: AM-LOK/NPT or other options per model.
InquireChangeover systems: R1100, R1200, R1400, R4100. Manifold systems: MPS110, MPS210, MR1100. Control panels: PS110, PS210, PS1100, PS1200. Changeover gas manifold/control: MR1200, MPS1100, MPS1200. Materials include SS316L/chrome-plated brass as listed.
InquireUHP terminal gas control and face-seal fittings. Series: PTU21, PSU21-1, PSU21-2, PSU21-2A, PSU22-1, PSU22-2, PSU22-2A. Fittings include Glands, Bodies, Micro-Fit, Tube BW Joint, Welding Assembly, and Union Fittings. Components include glands, reducers, tubes, gaskets, nuts, unions, tees, crosses, elbows, and male/female components.
InquireFull range of accessories: F10 & FT10 Series Filters, FA10 & FA12 Series, PTS130 Metal Hoses, GPS330G & AMA/B Flashback Arrestors, APF/APS Pressure Transmitters, AMS & AMN Manifolds, AME Extension Module, DISS Series, APR Metal Coils, ASCL Cylinder Connectors, DY-DAD-12 Digital Pressure Alarm, DY-IGPS-20 Intelligent Gas Pressure Controller.
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